From: Michael Huth (enigma_at_mail.lipsia.de)
Date: 2008-05-16 02:29:51
Hello, you know I don't write often here, but this might be of interest. I got a defect VIC2 R3 from Stephan Lesch today to map the IC. At first I thought this can be quite complicated and may require to put it into the ESEM (Environmental Scanning Electron Microscope), but after a brief check in an optical microscope the ICs structure was good visible. With a good adjustment of the image plane there are also the layers distinguishable. At least upto the third I guess. This was done at about 5000x. The mapping images were taken at 1000x. The width of a 'conduction line' is about 6 micrometer. I took an image every 0.5 mm whereas each image shows a wier area so there is an overlap to put the images together. To give you a brief idea how this looks I uploaded two images at: http://mail.lipsia.de/~enigma/vic2/10_5.png http://mail.lipsia.de/~enigma/vic2/10_6.png 10_6 is in the grid to the top of 10_5. So someone can read these images? Ciao... ...Micha Message was sent through the cbm-hackers mailing list
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