VIC2 IC images

From: Michael Huth (
Date: 2008-05-16 02:29:51


you know I don't write often here, but this might be of interest.
I got a defect VIC2 R3 from Stephan Lesch today to map the IC.
At first I thought this can be quite complicated and may require to put 
it into the ESEM (Environmental Scanning Electron Microscope),
but after a brief check in an optical microscope the ICs structure was 
good visible. With a good adjustment of the image plane there are
also the layers distinguishable. At least upto the third I guess. This 
was done at about 5000x.
The mapping images were taken at 1000x. The width of a 'conduction line' 
is about 6 micrometer.
I took an image every 0.5 mm whereas each image shows a wier area so 
there is an overlap to put the images together.

To give you a brief idea how this looks I uploaded two images at:

10_6 is in the grid to the top of 10_5.

So someone can read these images?


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